Acton紫外—— VUV/UV限波滤光片

基本信息

多层反射滤光片是全介质反射镜，在特定的VUV通过UV波长提供高反射率，同时发射较长波长的紫外到红外光。滤波器是为45度AOI设计的。

定制的峰值波长>250 nm的紫外滤光片可与DUV-VUV透过率低于~210 nm。

VUV/UV反射滤光片- Acton标准滤光片为45°AOI。

Wavelength	Peak Reflectance	1.0” Part Numbers	1.5” Part Numbers	2.0” Part Numbers
126nm	≥ 40%	M126-3045-1D	M126-3045-1.5D	M126-3045-2D
146nm	≥ 45%	M146-3045-1D	M146-3045-1.5D	M146-3045-2D
157nm	≥ 82%	M157-3045-1D	M157-3045-1.5D	M157-3045-2D
172nm	≥ 82%	M172-3045-1D	M172-3045-1.5D	M172-3045-2D
185nm	≥ 82%	M185-3045-1D	M185-3045-1.5D	M185-3045-2D
193nm	≥ 82%	M193-3045-1D	M193-3045-1.5D	M193-3045-2D
200nm	≥ 90%	M200-3045-1D	M200-3045-1.5D	M200-3045-2D
208nm	≥ 90%	M208-3045-1D	M208-3045-1.5D	M208-3045-2D
212nm	≥ 90%	M212-3045-1D	M212-3045-1.5D	M212-3045-2D
220nm	≥ 90%	M220-3045-1D	M220-3045-1.5D	M220-3045-2D
240nm	≥ 90%	M240-3045-1D	M240-3045-1.5D	M240-3045-2D
248nm	≥ 90%	M248-3045-1D	M248-3045-1.5D	M248-3045-2D
254nm	≥ 90%	M254-3045-1D	M254-3045-1.5D	M254-3045-2D
260nm	≥ 90%	M260-3045-1D	M260-3045-1.5D	M260-3045-2D
266nm	≥ 90%	M266-3045-1D	M266-3045-1.5D	M266-3045-2D
280nm	≥ 90%	M280-3045-1D	M280-3045-1.5D	M280-3045-2D
300nm	≥ 90%	M300-3045-1D	M300-3045-1.5D	M300-3045-2D
320nm	≥ 90%	M320-3045-1D	M320-3045-1.5D	M320-3045-2D
340nm	≥ 90%	M340-3045-1D	M340-3045-1.5D	M340-3045-2D
352nm	≥ 90%	M352-3045-1D	M352-3045-1.5D	M352-3045-2D
360nm	≥ 90%	M360-3045-1D	M360-3045-1.5D	M360-3045-2D

注意: 在175nm以下的过滤器衬底材料是CaF2和在175nm以上的熔融石英Fused Silica

注意：典型样品的涂层性能曲线显示。具体设计曲线，包括反射率和透过率可根据要求设计。